Energy Dispersive X-Ray Spectroscopy (2)

Elemental Mapping - Characteristic x-ray intensity is measured relative to lateral position on the sample. Variations in x-ray intensity at any characteristic energy value indicate the relative concentration for the applicable element across the surface. One or more maps are recorded simultaneously using image brightness intensity as a function of the local relative concentration of the element(s) present. About 1 µm lateral resolution is possible.

Line Profile Analysis - The SEM electron beam is scanned along a preselected line across the sample while x-rays are detected for discrete positions along the line. Analysis of the x-ray energy spectrum at each position provides plots of the relative elemental concentration for each element versus position along the line.

TYPICAL APPLICATIONS

• Foreign material analysis
• Corrosion evaluation
• Coating composition analysis
• Rapid material alloy identification
• Small component material analysis
• Phase identification and distribution

SAMPLE REQUIREMENTS

Samples up to 8 in. (200 mm) in diameter can be readily analyzed in the SEM. Larger samples, up to approximately 12 in. (300 mm) in diameter, can be loaded with limited stage movement. A maximum sample height of approximately 2 in. (50 mm) can be accommodated. Samples must also be compatible with a moderate vacuum atmosphere (pressures of 2 Torr or less).